陆军防化学院
纸质出版:2024
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刘亚东, 徐勇, 尤立娟, 等. 金属氧化物半导体气体传感器选择性改进研究进展[J]. 传感器与微系统, 2024,(10):1-5.
刘亚东, 徐勇, 尤立娟, 等. 金属氧化物半导体气体传感器选择性改进研究进展[J]. 传感器与微系统, 2024,(10):1-5. DOI: 10.13873/J.1000-9787(2024)10-0001-05.
选择性较差一直是金属氧化物半导体(MOS)传感器难以攻破的主要技术瓶颈。本文基于单层结构和分层结构两种角度,对目前解决MOS传感器选择性问题的技术途径进行了综述。基于单层结构提出的技术途径,能够在一定程度上提升传感器的选择性,但在实际应用环境下的抗干扰能力等方面存在一定的未知性和局限性。基于分层结构提出的技术途径,在对气体的响应过程中产生的具有差异性的特征,可以为传感器对目标气体的准确识别提供可靠依据。但分层结构MOS传感器一致性较难控制、制备技术要求较高、使用寿命相对较短等问题仍需进一步改进和完善。
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