1. 上海大学微电子学院
2. 上海大学转换医学研究院
纸质出版:2024
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姜保, 侍南, 吴炫烨, 等. 基于紫外纳米压印光刻的生物纳米孔测序MEMS芯片设计[J]. 传感器与微系统, 2024,(8):79-82.
姜保, 侍南, 吴炫烨, 等. 基于紫外纳米压印光刻的生物纳米孔测序MEMS芯片设计[J]. 传感器与微系统, 2024,(8):79-82. DOI: 10.13873/J.1000-9787(2024)08-0079-04.
纳米孔测序作为最新一代的基因测序技术,在生物医学和临床应用中起着至关重要的作用。测序系统中的MEMS结构通常采用传统光刻工艺来实现,本文首次运用紫外纳米压印光刻(UV-NIL)工艺来验证实现纳米孔测序系统中的MEMS芯片的可能性。采用传统光刻工艺,制造了3种用于纳米孔测序的MEMS双层结构的硅晶圆。这些硅晶圆被用作母板,将其MEMS结构图案精准复制到聚二甲基硅氧烷(PDMS)上,形成压印软模,再用UV-NIL工艺在硅基底上压印出所需的MEMS结构。最后,通过光学和电学两种测试表征手段,成功证实UV-NIL工艺在制造MEMS芯片方面的有效性和可行性。相较于传统光刻,UV-NIL的成功运用将极大提高工艺稳定性并大幅缩减成本。
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