1. 中国电子科技集团公司第四十九研究所
2. 北京空间机电研究所
纸质出版:2024
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徐振忠, 闫云龙, 尤佳, 等. 硅压阻式压力敏感芯体应变电阻失效分析[J]. 传感器与微系统, 2024,(6):38-41.
徐振忠, 闫云龙, 尤佳, 等. 硅压阻式压力敏感芯体应变电阻失效分析[J]. 传感器与微系统, 2024,(6):38-41. DOI: 10.13873/J.1000-9787(2024)06-0038-04.
通过对硅压阻式压力敏感芯体内部应变电阻失效故障的排查及定位分析,确立了应变电阻缺陷造成传感器失效机理,总结激发应变电阻缺陷暴露的检测方法,确定对压力敏感芯体进行1 200 h常温电老炼的筛选方案。筛选试验结果表明:增加1 200 h常温电老炼后,可剔除由于应变电阻缺陷造成敏感芯体输出漂移的失效元件。
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