长春理工大学机电工程学院
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丁海涛, 杨强, 司糈昊, 等. 基于导电岛系统的敏感元件制造方法研究[J]. 传感器与微系统, 2024,(5):23-26.
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本文基于特征角度为60°的导电岛微电极系统,探究低频条件下交流介电泳驱动金纳米粒子形成。首先,利用剥离(lift-off)方法制作了特征角度为60°的导电岛微电极系统,并基于该系统进行了纳米粒子介电组装实验,发现纳米粒子在低频范围内会形成纳米粒子短链或短簇结构;然后,基于电双层理论,分析了低频时交流电渗流(ACEO)对介电流动的影响,发现低频时电双层现象能够在一定程度上削弱流体中的电场和介电流动;最后,针对驱动频率为100 kHz的粒子轨迹分析发现该情况更易产生纳米粒子簇,较好地符合实验现象。
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