扬州大学机械工程学院
纸质出版:2024
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张燕军, 孙晨, 高吉成, 等. 高回弹性压阻式薄膜压力传感器的研究进展[J]. 传感器与微系统, 2024,(4):1-6.
张燕军, 孙晨, 高吉成, 等. 高回弹性压阻式薄膜压力传感器的研究进展[J]. 传感器与微系统, 2024,(4):1-6. DOI: 10.13873/J.1000-9787(2024)04-0001-06.
压阻式薄膜压力传感器作为薄膜压力传感器的重要分支,具有灵敏度高、响应快、弹性好等优点,如何同时实现高灵敏度、宽工作范围、快速响应和快速回弹是未来所面临的挑战,而新型材料、结构设计、传感器制备方式及动态特性建模是高回弹性传感器研制的关键。本文归纳了基底及活性层材料制备及其相应单一微结构、仿生结构、皱褶结构的设计,同时阐述了高回弹性压阻式薄膜的制备技术,总结了薄膜压力传感器动态建模和动态补偿的方法,最后对薄膜压力传感器发展中的新需求做了展望。
Jiangsu Key Laboratory of Environmentally Friendly Polymeric Materials Changzhou University Changzhou Jiangsu,Jiangsu Key Laboratory of Environmentally Friendly Polymeric Materials Changzhou University Changzhou Jiangsu,Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering Changzhou Jiangsu,Jiangsu Key Laboratory of Environmentally Friendly Polymeric Materials Changzhou University Changzhou Jiangsu,Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering Changzhou Jiangsu,Jiangsu Key Laboratory of Environmentally Friendly Polymeric Materials Changzhou University Changzhou Jiangsu,Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering Changzhou Jiangsu.Durable, Sensitive, and Wide‐Range Wearable Pressure Sensors Based on Wavy‐Structured Flexible Conductive Composite Film[J].Macromolecular Materials and Engineering,2020.
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Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Engineering Laboratory of Specialty Fibers and Nuclear Energy Materials, Ningbo Institute of Materials Engineering and Technology, Chinese Academy of Science, Ningbo, Zhejiang 315201 China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China,Engineering Laboratory of Specialty Fibers and Nuclear Energy Materials, Ningbo Institute of Materials Engineering and Technology, Chinese Academy of Science, Ningbo, Zhejiang 315201 China,Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO) & School of Physics, Huazhong University of Science and Technology (HUST), LuoyuRoad 1037, Wuhan 430074, China.3D hybrid porous Mxene-sponge network and its application in piezoresistive sensor[J].Nano Energy,2018.
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0000 0004 0368 7223, grid.33199.31, Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO), School of Physics, Huazhong University of Science and Technology (HUST), Luoyu Road 1037, 430074, Wuhan, China,0000 0004 0368 7223, grid.33199.31, Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO), School of Physics, Huazhong University of Science and Technology (HUST), Luoyu Road 1037, 430074, Wuhan, China,0000 0004 0368 7223, grid.33199.31, Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO), School of Physics, Huazhong University of Science and Technology (HUST), Luoyu Road 1037, 430074, Wuhan, China,0000 0004 0368 7223, grid.33199.31, Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO), School of Physics, Huazhong University of Science and Technology (HUST), Luoyu Road 1037, 430074, Wuhan, China,0000 0001 2254 5798, grid.256609.e, College of Physics Science & Technology, Guangxi University, Daxue Road 100, 530004, Nanning, China,0000 0000 9050 0527, grid.440725.0, School of Material Science & Engineering, Guangxi Nonferrous Metals Mineral and Materials, Collaborative Innovation Center, Guilin University of Technology, Jian’gan Road 12, 541004, Guilin, Guangxi, China,0000 0001 2331 6153, grid.49470.3e, School of Physics and Technology, Center for Electron Microscopy and MOE Key Laboratory of Artificial Micro- and Nano-Structures, and Institute for Advanced Studies, Wuhan University, 430072, Wuhan, China,0000 0004 1799 0602, grid.443568.8, School of Sciences, Hubei University of Automotive Technology, 442002, Shiyan, China,0000 0004 0368 7223, grid.33199.31, Center for Nanoscale Characterization & Devices (CNCD), Wuhan National Laboratory for Optoelectronics (WNLO), School of Physics, Huazhong University of Science and Technology (HUST), Luoyu Road 1037, 430074, Wuhan, China,0000 0001 2254 5798, grid.256609.e, College of Physics Science & Technology, Guangxi University, Daxue Road 100, 530004, Nanning, China,0000 0000 8775 1413, grid.433800.c, School of Material Science and Engineering, Wuhan Institute of Technology, 430205, Wuhan, China.A highly flexible and sensitive piezoresistive sensor based on MXene with greatly changed interlayer distances.[J].Nature communications,2017.
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grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.419082.6, 0000 0004 1754 9200, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency (JST), 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.419082.6, 0000 0004 1754 9200, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency (JST), 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.267323.1, 0000 0001 2151 7939, Present address: The University of Texas at Dallas, Department of Materials Science and Engineering, 800 West Campbell Road, Richardson, Texas 75080-3021, USA.,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.9970.7, 0000 0001 1941 5140, Johannes Kepler University, Soft Matter Physics, Altenbergerstrasse 69, 4040 Linz, Austria,grid.26999.3d, 0000 0001 2151 536X, The University of Tokyo, Electrical and Electronic Engineering and Information Systems, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan,grid.419082.6, 0000 0004 1754 9200, Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency (JST), 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan.An ultra-lightweight design for imperceptible plastic electronics.[J].Nature,2013.
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