基于纳米铂黑材料的超高辐射率MEMS红外光源研究

树东生; 陶继方; 徐茂森; 赵佳; 李炎; 张小水

doi:10.13873/J.1000-9787(2024)03-0039-04

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基于纳米铂黑材料的超高辐射率MEMS红外光源研究

研究与探讨 | 更新时间：2025-09-11

- 基于纳米铂黑材料的超高辐射率MEMS红外光源研究
- 暂无标题
- 传感器与微系统 2024年第3期页码：39-42+51
- 作者机构：
  
  1. 山东大学信息科学与工程学院
  2. 山东大学激光与红外系统集成技术教育部重点实验室
  3. 汉威科技集团股份有限公司
- 作者简介：
- 基金信息：
  
  国家重点研发计划资助项目(SQ2019YFB200002)
- DOI：10.13873/J.1000-9787(2024)03-0039-04
  中图分类号： TB383.1;TP212
- 纸质出版：2024
- 稿件说明：
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树东生, 陶继方, 徐茂森, 等. 基于纳米铂黑材料的超高辐射率MEMS红外光源研究[J]. 传感器与微系统, 2024,(3):39-42+51.
树东生, 陶继方, 徐茂森, 等. 基于纳米铂黑材料的超高辐射率MEMS红外光源研究[J]. 传感器与微系统, 2024,(3):39-42+51. DOI： 10.13873/J.1000-9787(2024)03-0039-04.

DOI：

摘要

本文基于微机电系统（MEMS）设计和加工技术，研制了一种高辐射率、低功耗、高调制速率的MEMS红外（IR）光源，通过在工艺中引入高可靠的纳米铂黑（Pt-black）材料作为红外辐射层，在2～14μm光谱范围内成功实现了99.5%以上的平均辐射效率。在5 V驱动电压下，该MEMS红外光源的辐射区温度达到407℃

响应时间(T

)为17 ms

在10 Hz和100 Hz工作频率下的调制深度分别达到100%和42%。最后，把该MEMS红外光源芯片集成在一种微型二氧化碳（CO

）气体传感器样机中进行了实验验证，结果表明：该器件具备良好的辐射特性和温度特性。该MEMS红外光源可以用于常规的CO

和甲烷（CH

）气体检测，以及二氧化硫（SO

）、硫化氢（H

S）、六氟化硫（SF

）、氨气（NH

）等多种工业气体检测。

Abstract

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references

杨靖,李小飞,李中洲,余隽,唐祯安,梅勇,张灵舒,袁宇鹏.一种用于CO_2气体传感器的新型MEMS红外光源[J].半导体光电,2021(05).

刘卫兵,谭秋林,明安杰,孙西龙,毛海央,岱钦,张岳,姚俊,王玮冰,熊继军.面向MEMS红外光源的高辐射率纳米硅结构制备[J].仪表技术与传感器,2017(06).

任耀辉,谭秋林,欧文,明安杰,熊继军,陈大鹏.基于纳米黑硅的新型MEMS红外光源[J].电子元件与材料,2015(05).

Xu Maosen,Xu Yan,Tao Jifang,Li Yan,Kang Qiaoqiao,Shu Dongsheng,Li Tie,Liu Yanxiang.A design of an ultra-compact infrared gas sensor for respiratory quotient (qCO2) detection[J].Sensors and Actuators: A. Physical,2021.

Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Department of Chemical and Biomolecular Engineering , National University of Singapore , 4 Engineering Drive 4 , 117585 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,School of Electrical and Electronic Engineering , Nanyang Technological University , 50 Nanyang Avenue , 639798 , Singapore.,School of Electrical and Electronic Engineering , Nanyang Technological University , 50 Nanyang Avenue , 639798 , Singapore.,School of Electrical and Electronic Engineering , Nanyang Technological University , 50 Nanyang Avenue , 639798 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Institute of Microelectronics , A*STAR (Agency for Science, Technology and Research) , 2 Fusionopolis Way , 138634 , Singapore.,Department of Chemical and Biomolecular Engineering , National University of Singapore , 4 Engineering Drive 4 , 117585 , Singapore..Radiation Enhancement by Graphene Oxide on Microelectromechanical System Emitters for Highly Selective Gas Sensing.[J].ACS sensors,2019.

Andres Russu,Antonio J. de Castro,Francisco Cortes,Celia López-Ongil,Marta Portela,Ernesto Garcia,José A. Miranda,Manuel F. Canabal,Ignacio Arruego,Javier Martinez-Oter,Fernando López.A light compact and rugged IR sensor for space applications[J].Optical Engineering + Applications,2019.

Shunsuke Akasaka,Encho Boku,Yurina Amamoto,Hiroyuki Yuji,Isaku Kanno.Ultrahigh temperature platinum microheater encapsulated by reduced-TiO 2 barrier layer[J].Sensors and Actuators: A. Physical,2019.

Lochbaum Alexander,Fedoryshyn Yuriy,Dorodnyy Alexander,Koch Ueli,Hafner Christian,Leuthold Juerg.On-Chip Narrowband Thermal Emitter for Mid-IR Optical Gas Sensing[J].ACS Photonics,2017.

Rajeswara Rao Langoju Lakshmi,Singha Monoj Kumar,Subramaniam Kiruba Mangalam,Jampana Nagaraju,Asokan Sundarrajan.Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization[J].IEEE Sensors Journal,2017.

T.A. Vincent,J.W. Gardner.A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels[J].Sensors & Actuators: B. Chemical,2016.

Peng Zhou,Ranbin Chen,Na Wang,Haisheng San,Xuyuan Chen.Reliability Design and Electro-Thermal-Optical Simulation of Bridge-Style Infrared Thermal Emitters[J].Micromachines,2016.

M.F. Chowdhury,R. Hopper,S.Z. Ali,J.W. Gardner,F. Udrea.MEMS Infrared Emitter and Detector for Capnography Applications[J].Procedia Engineering,2016.

Gerald Pühringer,Bernhard Jakoby.Modeling of a Highly Optimizable Vertical-Cavity Thermal Emitter for the Mid-Infrared[J].Procedia Engineering,2016.

Ali, Syed Zeeshan,De Luca, Andrea,Hopper, Richard,Boual, Sophie,Gardner, Julian,Udrea, Florin.A Low-Power, Low-Cost Infra-Red Emitter in CMOS Technology[J].IEEE sensors journal,2015.

A. De Luca,M.T. Cole,R.H. Hopper,S.Z. Ali,F. Udrea,J.W. Gardner,W.I. Milne.SOI CMOS MEMS Infra-red Thermal Source with Carbon Nanotubes Coating[J].Procedia Engineering,2014.

Haisheng San,Changzheng Li,Xuyuan Chen,Ranbin Chen,Qiang Zhang.Silicon-Based Micro-Machined Infrared Emitters With a Micro-Bridge and a Self-Heating Membrane Structure[J].IEEE Photonics Technology Letters,2013.

C. Calaza,M. Salleras,N. Sabaté,J. Santander,C. Cané,L. Fonseca.A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer[J].Microsystem Technologies,2012.

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