1. 佛山职业技术学院汽车工程学院
2. 深圳大学物理与光电工程学院
纸质出版:2024
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钟远婷, 孙爱发, 刘阳泉, 等. Pd/Ga2O3/AlGaN/GaN HEMT基氢气传感器研究[J]. 传感器与微系统, 2024,(3):18-21.
钟远婷, 孙爱发, 刘阳泉, 等. Pd/Ga2O3/AlGaN/GaN HEMT基氢气传感器研究[J]. 传感器与微系统, 2024,(3):18-21. DOI: 10.13873/J.1000-9787(2024)03-0018-04.
氢气易燃易爆,因此需要海量快速响应的氢气传感器对加氢站、运输车及氢能源汽车等氢能源各个环节进行预警预报。本文研究了基于贵金属钯(Pd)为栅极的高速二维电子气晶体管(HEMT)型氢气传感器,金属Pd栅极为敏感电极,Ti/Al/Ti/Au为源漏极。结果表明:该晶体管开关比为3.58×10~7。实验研究了不同厚度Ga
2
O
3
插入层对氢气响应特性的影响规律。随着Ga
2
O
3
插入层的厚度增大,传感器的饱和体积分数明显增大,从1×10
-3
提高到7×10
-3
。对于Ga
2
O
3
插入层厚度为10 nm的器件,其综合性能最好,饱和浓度为5×10
-3
且具有很高的响应度,1×10
-3
时的响应度为4 300%。特别地,其响应速度非常快,最快可以2 s内完成氢气检测。
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School of Material Science and Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Key Laboratory for Colloid and interface Chemistry of Education Ministry, Department of Chemistry, Shandong University, Jinan, Shandong 250100, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,School of Material Science and Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Key Laboratory for Colloid and interface Chemistry of Education Ministry, Department of Chemistry, Shandong University, Jinan, Shandong 250100, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China.,Laboratory of Functional Molecules and Materials, School of Physics and Optoelectronic Engineering, Shandong University of Technology, Zibo, Shandong 255000, China..Fabrication of ZnO Nanoparticles Modified by Uniformly Dispersed Ag Nanoparticles: Enhancement of Gas Sensing Performance.[J].ACS omega,2020.
Zhongjun Han,Jun Ren,Junjing Zhou,Shiyun Zhang,Zili Zhang,Liu Yang,Chenbo Yin.Multilayer porous Pd-WO 3 composite thin films prepared by sol-gel process for hydrogen sensing[J].International Journal of Hydrogen Energy,2020.
Shen Bowei,Luo Jingting,Xie Yizhu,Zhang Dongping,Fan Ping,Zhong Aihua.Hydrogen gas ppb-level detection based on AlGaN/GaN high electron mobility transistor with 2.0 nm thick Pt gate layer[J].Applied Physics Letters,2019.
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A. Wisitsoorat,M.Z. Ahmad,M.H. Yaacob,M. Horpratum,D. Phakaratkul,T. Lomas,A. Tuantranont,W. Wlodarski.Optical H 2 sensing properties of vertically aligned Pd/WO 3 nanorods thin films deposited via glancing angle rf magnetron sputtering[J].Sensors & Actuators: B. Chemical,2013.
Zhibo Guo,Lai Wang,Zhibiao Hao,Yi Luo.Modeling and experimental study on sensing response of an AlGaN/GaN HEMT-based hydrogen sensor[J].Sensors & Actuators: B. Chemical,2013.
Yan-Ying Tsai,Kun-Wei Lin,Huey-Ing Chen,Ching-Wen Hung,Tzu-Pin Chen,Wen-Chau Liu.Comprehensive analysis of hydrogen sensing properties of a Pd-gate metal-semiconductor high electron mobility transistor[J].Applied Physics Letters,2007.
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