华北电力大学环境科学与工程学院
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马祥云, 王素华. 基于MOS的CO气体传感器研究进展[J]. 传感器与微系统, 2024,(3):6-9+13.
马祥云, 王素华. 基于MOS的CO气体传感器研究进展[J]. 传感器与微系统, 2024,(3):6-9+13. DOI: 10.13873/J.1000-9787(2024)03-0006-04.
实现对一氧化碳(CO)气体的现场快速监测对公众的健康有重要意义。与传统CO检测方法相比,基于金属氧化物半导体(MOS)的气体传感器具有制作方法简单、操作方便、传感性能优越和可实时监测等优点,被广泛地应用于有毒有害气体的检测。本文介绍了基于MOS材料的CO气体传感器件的传感机理及其研究现状,结合国内外的研究进展,综述了基于MOS的CO传感器传感性能的改善方法,并展望了MOS基CO气体传感器的发展方向。
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