Ag纳米颗粒增强SnO<sub>2</sub>纳米薄膜的室温气敏性能研究

刘文强; 吴鹏举; 王瑗瑗; 连艳利; 杨莹丽

doi:10.13873/J.1000-9787(2024)02-0045-04

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Ag纳米颗粒增强SnO₂纳米薄膜的室温气敏性能研究

研究与探讨 | 更新时间：2025-09-11

- Ag纳米颗粒增强SnO₂纳米薄膜的室温气敏性能研究
- 暂无标题
- 传感器与微系统 2024年第2期页码：45-48
- 作者机构：
  
  1. 河南理工大学物理与电子信息学院
  2. 中国联合网络通信有限公司焦作市分公司
  3. 河南理工大学分析测试中心
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(62173128);河南省高校科技创新团队支持计划资助项目(21IRTSTHN016);河南省高校基本科研业务费资助项目(NSFRF210324)
- DOI：10.13873/J.1000-9787(2024)02-0045-04
  中图分类号： TB383.2;TP212
- 纸质出版：2024
- 稿件说明：
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刘文强, 吴鹏举, 王瑗瑗, 等. Ag纳米颗粒增强SnO₂纳米薄膜的室温气敏性能研究[J]. 传感器与微系统, 2024,(2):45-48.
刘文强, 吴鹏举, 王瑗瑗, 等. Ag纳米颗粒增强SnO₂纳米薄膜的室温气敏性能研究[J]. 传感器与微系统, 2024,(2):45-48. DOI： 10.13873/J.1000-9787(2024)02-0045-04.

DOI：

摘要

采用磁控溅射法在p-Si衬底上沉积二氧化锡（SnO

）纳米薄膜并在其上负载银（Ag）纳米颗粒作为气体传感器的敏感材料。实验结果表明：负载Ag纳米颗粒提高了SnO

纳米薄膜的灵敏度。Ag溅射时间为80 s

负载量为6%质量分数的SnO

纳米薄膜对乙醇气体的响应值较未负载Ag纳米颗粒时提高了78.7%

这可以归因于Ag纳米颗粒与SnO

纳米薄膜之间形成了异质结。实验测试了工作电压对SnO

纳米薄膜灵敏度的影响，当工作电压均为5.5 V时，传感器对乙醇和丙酮气体的响应最佳，响应值分别为3.49和4.51。

Abstract

关键词

Keywords

references

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Ag纳米颗粒增强SnO2纳米薄膜的室温气敏性能研究

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DOI：10.13873/J.1000-9787(2024)02-0045-04

摘要

Abstract

关键词

Keywords

references

Ag纳米颗粒增强SnO₂纳米薄膜的室温气敏性能研究