文明轩,李珏,王成,凌晨,辜凌云,丁延卫.高精度温度传感、测量与控制技术综述[J].中山大学学报(自然科学版),2021(Z1).

孙炎,黄文斌.一种铂电阻温度传感器的密封性设计[J].传感技术学报,2020(07).

汪国军,白煜,胡少杰,张敏,王书蓓,万飞.退火工艺对磁控溅射生长的Pt薄膜微观结构及电性能的影响[J].材料导报,2019(S2).

姜国光,王震,张洪泉,王大兴.高灵敏度铂薄膜热敏电阻器精细刻蚀技术研究[J].传感器与微系统,2013(03).

姜国光,段成丽,张洪泉.一种基于MEMS技术的冗余Pt温度传感器研究[J].传感器与微系统,2012(07).

王小军,李义兵,周继承.薄膜温度传感器敏感功能膜[J].材料导报,2005(04).

Timo Sch?ssler,Florian Sch?n,Christian Lemier,Gerald Urban.Reliability improvements of thin film platinum resistors on wafer-level and micro-hotplates at stress temperatures in the range of 140–290 °C[J].Microelectronics Reliability,2020(C).

Jie Han,Ping Cheng,Hong Wang,Congchun Zhang,Jiubin Zhang,Yan Wang,Li Duan,Guifu Ding.MEMS-based Pt film temperature sensor on an alumina substrate[J].Materials Letters,2014.

R.M. Tiggelaar,R.G.P. Sanders,A.W. Groenland,J.G.E. Gardeniers.Stability of thin platinum films implemented in high-temperature microdevices[J].Sensors & Actuators: A. Physical,2009.

P Ekkels,X Rottenberg,R Puers,H A C Tilmans.Evaluation of platinum as a structural thin film material for RF-MEMS devices[J].Journal of Micromechanics and Microengineering,2009.

Nam Hoon Kim,Dong Myong Na,Pil Ju Ko,Jin Seong Park,Woo Sun Lee.Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process[J].Solid State Phenomena,2007.

Jikwang Kim,Jongsung Kim,Younghwa Shin,Youngsoo Yoon.A study on the fabrication of an RTD (resistance temperature detector) by using Pt thin film[J].Korean Journal of Chemical Engineering,2001.

L Crovini,H J Jung,R C Kemp,S K Ling,B W Mangum,H Sakurai.The Platinum Resistance Thermometer Range of the International Temperature Scale of 1990[J].Metrologia,1991(4).