1. 河南理工大学物理与电子信息学院
2. 福州军代室
3. 河南理工大学分析测试中心
纸质出版:2023
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吴鹏举, 刘文强, 汤子鑫, 等. 磁控溅射SnO2/ZnO复合纳米薄膜的气敏特性研究[J]. 传感器与微系统, 2023,(12):21-24.
吴鹏举, 刘文强, 汤子鑫, 等. 磁控溅射SnO2/ZnO复合纳米薄膜的气敏特性研究[J]. 传感器与微系统, 2023,(12):21-24. DOI: 10.13873/J.1000-9787(2023)12-0021-04.
采用射频磁控溅射方法,在溅射气压为2.5 Pa时,在p-Si衬底上沉积氧化锡(SnO
2
)/氧化锌(ZnO)复合纳米薄膜。沉积过程中,SnO
2
薄膜的沉积厚度固定为40 nm
通过改变ZnO薄膜的沉积厚度来改变SnO
2
/ZnO的膜厚比。详细分析了工作温度和膜厚比变化对复合纳米薄膜气敏特性的影响。结果表明,SnO
2
/ZnO复合纳米薄膜的最佳工作温度为350℃
与ZnO和SnO
2
单层薄膜相比,复合纳米薄膜的气敏性能显著提升。当SnO
2
与ZnO的膜厚比为4︰3时,其气敏性能最佳,在350℃下,对于5×10
-6
乙醇气体的灵敏度最高可达4。该SnO
2
/ZnO复合纳米薄膜气敏性能的提升归因于ZnO与SnO
2
之间形成的n-n异质结。
二氧化锡纳米管的制备及气敏与发光性能研究[J]. 赵治华;张帅文.广州化工,2021(18)
In_(0.3)Ga_(0.7)As多层耦合表面量子点气敏特性分析[J]. 刘增光;杨莹丽;王国东;王俊君;杨林林;璩光明.传感器与微系统,2021(05)
ZnO基材料室温气体传感性能研究综述[J]. 张永辉;彭明星;王超楠;巩飞龙.化学试剂,2021(03)
ZnO纳米棒阵列的制备及其气敏性能研究[D]. 雷聪.西安理工大学,2021(01)
Sensing platform of PdO-ZnO-In2O3 nanofibers using MOF templated catalysts for triethylamine detection[J]. Guo Lanlan;Zhang Bo;Yang Xueli;zhang Saisai;Wang Yan;Wang Guodong;Zhang Zhanying.Sensors and Actuators: B. Chemical,2021
UV excited gas sensing SnO2-ZnO aerogels to ppb-level ethanol detection[J]. Li Haokun;Yang Zhaoyun;Ling Wanyi;Zhu Dachuan;Pu Yong.Sensors and Actuators: B. Chemical,2021
Strong sulfur passivation effects on the gas sensitivity of an In0.3Ga0.7As surface quantum dots coupling structure[J]. Wu Jun;Yang Yingli;Liu Zengguang;Wang Guodong.Journal of Crystal Growth,2021
Porous ZnO–SnO 2 –Zn 2 SnO 4 heterojunction nanofibers fabricated by electrospinning for enhanced ethanol sensing properties under UV irradiation[J]. Yuanyi Zhang;Xia Xin;Hui Sun;Qianru Liu;Jinniu Zhang;Gang Li;Jianzhi Gao;Hongbing Lu;Chunlan Wang.Journal of Alloys and Compounds,2021
Novel ultrathin mesoporous ZnO-SnO 2 n-n heterojunction nanosheets with high sensitivity to ethanol[J]. Shuaiwei Qin;Pinggui Tang;Yongjun Feng;Dianqing Li.Sensors and Actuators: B. Chemical,2020
Fabrication of 3D Multi-Edges Cube Porous SnO2/ZnO Composites as High-Performance NOx Gas Sensor[J]. Liu Ning;Yu Hui;Yang Ying;Dong Xiang Ting.IEEE Sensors Journal,2020
One step synthesis of branched SnO 2 /ZnO heterostructures and their enhanced gas-sensing properties[J]. Xueli Yang;Sufang Zhang;Qi yu;Liupeng Zhao;Peng Sun;Tianshuang Wang;Fangmeng Liu;Xu Yan;Yuan Gao;Xishuang Liang;Sumei Zhang;Geyu Lu.Sensors & Actuators: B. Chemical,2019
Low power-consumption CO gas sensors based on Au-functionalized SnO 2 -ZnO core-shell nanowires[J]. Jae-Hun Kim;Ali Mirzaei;Hyoun Woo Kim;Sang Sub Kim.Sensors & Actuators: B. Chemical,2018
On-Chip Growth of SnO2/ZnO Core–Shell Nanosheet Arrays for Ethanol Detection[J]. Gong Huimin;Zhao Changhui;Wang Fei.IEEE Electron Device Letters,2018
Highly sensitive and low detection limit of ethanol gas sensor based on hollow ZnO/SnO2 spheres composite material[J]. Jiangyang Liu;Tianshuang Wang;Boqun Wang;Peng Sun;Qiuyue Yang;Xishuang Liang;Hongwei Song;Geyu Lu.Sensors & Actuators: B. Chemical,2017
Synthesis and gas sensing application of porous CeO 2 –ZnO hollow fibers using cotton as biotemplates[J]. Shaohui Yan;Shuyi Ma;Xiaoli Xu;Yan Lu;Haiqin Bian;Xiyin Liang;Wenxuan Jin;Hengming Yang.Materials Letters,2016
Nonaqueous synthesis of Ag-functionalized In3/ZnO nanocomposites for highly sensitive formaldehyde sensor[J]. Dong Chenjun;Liu Xu;Han Bingqian;Deng Shaojuan;Xiao Xuechun;Wang Yude.Sensors & Actuators: B. Chemical,2015
ZnO–SnO 2 based composite type gas sensor for selective hydrogen sensing[J]. Biplob Mondal;Borat Basumatari;Jayoti Das;Chirosree Roychaudhury;Hiranmay Saha;Nillohit Mukherjee.Sensors & Actuators: B. Chemical,2014
UV-enhanced NO2 gas sensing properties of SnO2-core/ZnO-shell nanowires at room temperature.[J]. Park Sunghoon;An Soyeon;Mun Youngho;Lee Chongmu.ACS applied materials & interfaces,2013
The selective detection of C 2 H 5 OH using SnO 2 –ZnO thin film gas sensors prepared by combinatorial solution deposition[J]. Ki-Won Kim;Pyeong-Seok Cho;Sun-Jung Kim;Jong-Heun Lee;Chong-Yun Kang;Jin-Sang Kim;Seok-Jin Yoon.Sensors & Actuators: B. Chemical,2006
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