中北大学仪器与电子学院仪器科学与动态测试教育部重点实验室
纸质出版:2023
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薛一凡, 王采慧, 裴涛, 等. 悬臂梁式扫描微波探针设计[J]. 传感器与微系统, 2023,(6):74-77.
薛一凡, 王采慧, 裴涛, 等. 悬臂梁式扫描微波探针设计[J]. 传感器与微系统, 2023,(6):74-77. DOI: 10.13873/J.1000-9787(2023)06-0074-04.
微波芯片的高度集成化对扫描微波成像技术提出了新的挑战,设计了一种结构简单、辐射效率高和耦合低特性的悬臂梁式扫描微波探针。通过建立探针三维有限元数值模型,在不同微波频率和不同探针结构下分别研究了探针针尖倏逝电场分布。有无屏蔽结构的探针针尖与样品间的电场分布表明,屏蔽层有效降低了悬臂梁下方非针尖部分微波信号的辐射,悬臂梁—样品的寄生电容显著减小,且在多个工作频率段具有高空间分辨与高辐射效率的特性。设计的探针满足微波芯片对高频、高空间分辨扫描微波成像的需求。
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