单片集成三轴微机电陀螺仪[J]. 邢朝洋;赵克;徐宇新.导航与控制,2017(02)

Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics.[J]. Din Hussamud;Iqbal Faisal;Lee Byeungleul.Micromachines,2020

Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers.[J]. Lu Qianbo;Wang Chen;Bai Jian;Wang Kaiwei;Lou Shuqi;Jiao Xufen;Han Dandan;Yang Guoguang;Liu Dong;Yang Yongying.Optics express,2016

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation[J]. Qianbo Lu;Chen Wang;Jian Bai;Kaiwei Wang;Wenxiu Lian;Shuqi Lou;Xufen Jiao;Guoguang Yang.Applied Optics,2015

High resolution capacitance detection circuit for rotor micro-gyroscope[J]. Ming Yuan Ren;Hai Feng Zhang;Xiao Wei Liu;Zhi Gang Mao.AIP Advances,2014

Performance Evaluation of MMA7260QT and ADXL345 on Self Balancing Robot[J]. Djoko Purwanto;Handry Khoswanto;Hany Ferdinando.Telkomnika: Telecommunication Computing Electronics and Control,2013

Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices[J]. Vipin Ayanoor-Vitikkate;Kuan-lin Chen;Woo-Tae Park;Thomas W. Kenny.Sensors & Actuators: A. Physical,2009

Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer.[J]. Keeler Bianca E N;Carr Dustin W;Sullivan John P;Friedmann Thomas A;Wendt Joel R.Optics letters,2004

Dual-axis microgyroscope with closed-loop detection[J]. S. An;Y.S. Oh;K.Y. Park;S.S. Lee;C.M. Song.Sensors & Actuators: A. Physical,1999(1)