1. 台州职业技术学院中德学院
2. 铂瑞赛斯仪器科技(嘉兴)有限公司
纸质出版:2023
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蒋梦琳, 卢治中, 周鑫磊, 等. 基于金属酞菁/碳点的室温NO2气体传感器研究[J]. 传感器与微系统, 2023,(2):5-8+12.
蒋梦琳, 卢治中, 周鑫磊, 等. 基于金属酞菁/碳点的室温NO2气体传感器研究[J]. 传感器与微系统, 2023,(2):5-8+12. DOI: 10.13873/J.1000-9787(2023)02-0005-04.
以金属氧化物为主的传统半导体气体传感器存在诸如工作温度高、功率大、灵敏度低、抗干扰能力差和选择性差等问题。本文研究利用金属酞菁(MPc
分子直径约1.3 nm)和碳点(CDs
直径分布在1~10 nm)尺寸级别相似,容易构建共轭平面结构,实现电荷在材料内快速转移,从而实现传感器对特定气体分子的室温超灵敏响应。本文通过L—谷氨酸水热合成CDs
与四羧基钴酞菁(CoPc-COOH)复合,并在带有叉指电极的硅片上成膜组装成传感器件。该传感器在室温工作下对5×10
-5
的NO
2
气体在100 s内响应值可以达到12.3
在激光辅助恢复的前提下,具有良好的重复性、最低检测极限和长期稳定性。该成果对于以有机半导体和碳纳米材料为基底的气体传感器发展提供了一条新的思路。
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