电化学湿法腐蚀法制备硅微柱阵列 [J]. 李鑫,罗洁,任丁. 电子元件与材料 . 2018(11)

等离子体刻蚀工艺的优化研究 [J]. 王晓光,朱晓明,尹延昭. 中国新技术新产品 . 2010(14)

周期极化微结构超短脉冲倍频的理论和实验研究 [D]. 张双根. 南开大学 2009

碳化硅薄膜材料及其在高温传感器件中的应用 [D]. 雷永明. 中国科学院上海冶金研究所 2000

Implications of Ageing Through Power Cycling on the Short-Circuit Robustness of 1.2-kV SiC mosfets [J] . Reigosa Paula Diaz,Luo Haoze,Iannuzzo Francesco. IEEE Transactions on Power Electronics . 2019 (11)

Research on 355?nm all-solid-state ultraviolet laser processing through silicon holes [J] . Liang Ting,Li Qisi,Lei Cheng,Li Wangwang,Li Yongwei,Lin Lina,Yang Jiaoyan,Wang Wentao,Li Zhiqiang,Chen Guidong,Xiong Jijun. Journal of Laser Applications . 2019 (2)

Electronics and Packaging Intended for Emerging Harsh Environment Applications: A Review [J] . Hassan Ahmad,Savaria Yvon,Sawan Mohamad. IEEE Transactions on Very Large Scale Integration （VLSI） Systems . 2018 (10)

Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications. [J] . Phan Hoang-Phuong,Cheng Han-Hao,Dinh Toan,Wood Barry,Nguyen Tuan-Khoa,Mu Fengwen,Kamble Harshad,Vadivelu Raja,Walker Glenn,Hold Leonie,Iacopi Alan,Haylock Ben,Dao Dzung Viet,Lobino Mirko,Suga Tadatomo,Nguyen Nam-Trung. ACS applied materials ＆ interfaces . 2017 (33)

Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures [J] . Juan Ren,Michael Ward,Peter Kinnell,Russell Craddock,Xueyong Wei. Sensors . 2016 (2)

Fabrication of SiC nanopillars by inductively coupled SF＜SUB＞6＜/SUB＞/O＜SUB＞2＜/SUB＞ plasma etching [J] . J H Choi,L Latu-Romain,E Bano,F Dhalluin,T Chevolleau,T Baron. Journal of Physics D: Applied Physics . 2012 (23)

Advances of SiC-based MOS capacitor hydrogen sensors for harsh environment applications [J] . Mun Teng Soo,Kuan Yew Cheong,Ahmad Fauzi Mohd Noor. Sensors ＆ Actuators: B. Chemical . 2010 (1)

Interface Passivation for Silicon Dioxide Layers on Silicon Carbide [J] . Sarit Dhar,Shurui Wang,John R. Williams,Sokrates T. Pantelides,Leonard C. Feldman. MRS Bulletin . 2005 (4)