基于ELCR的双模微波湿度传感器

丁书聪; 梁峻阁; 黄宜明; 顾晓峰

doi:10.13873/J.1000-9787(2022)07-0065-04

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基于ELCR的双模微波湿度传感器

设计与制造 | 更新时间：2025-09-11

- 基于ELCR的双模微波湿度传感器
- 基于ELCR的双模微波湿度传感器
- 传感器与微系统 2022年第7期页码：65-68+80
- 作者机构：
  
  物联网技术应用教育部工程研究中心江南大学电子工程系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2022)07-0065-04
  中图分类号： TP212
- 纸质出版：2022
- 稿件说明：
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丁书聪, 梁峻阁, 黄宜明, 等. 基于ELCR的双模微波湿度传感器[J]. 传感器与微系统, 2022,(7):65-68+80.

基于ELCR的双模微波湿度传感器[J]. 2022, (7): 65-68+80.
丁书聪, 梁峻阁, 黄宜明, 等. 基于ELCR的双模微波湿度传感器[J]. 传感器与微系统, 2022,(7):65-68+80. DOI： 10.13873/J.1000-9787(2022)07-0065-04.

基于ELCR的双模微波湿度传感器[J]. 2022, (7): 65-68+80. DOI： 10.13873/J.1000-9787(2022)07-0065-04.

摘要

基于电耦合电感电容谐振器（ELCR）设计并制造了一种新型聚酰亚胺微波湿度传感器（PMHS）

PMHS的双谐振点位置与幅度可按检测需求灵活调节。实验结果显示：在10%～90%RH的湿度范围内，PMHS在1.2 GHz处谐振点偏移量和2.085 GHz处反射系数增量与湿度变化成线性关系，双模线性度R~2分别为0.985 4和0.998 7

两者的检测灵敏度分别为83.8 kHz/%RH和0.117 dB/%RH。该研究表明：多谐振微波传感器可作为一种新方案实现宽范围、高线性度、高灵敏度的湿度检测。

Abstract

基于电耦合电感电容谐振器（ELCR）设计并制造了一种新型聚酰亚胺微波湿度传感器（PMHS）

两者的检测灵敏度分别为83.8 kHz/%RH和0.117 dB/%RH。该研究表明：多谐振微波传感器可作为一种新方案实现宽范围、高线性度、高灵敏度的湿度检测。

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