上海交通大学电子信息与电气工程学院先进电子材料与器件平台
纸质出版:2022
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张笛, 张琰, 孔路瑶, 等. 纳米压印技术的发展及其近期的应用研究[J]. 传感器与微系统, 2022,(5):1-5.
纳米压印技术的发展及其近期的应用研究[J]. 2022, (5): 1-5.
张笛, 张琰, 孔路瑶, 等. 纳米压印技术的发展及其近期的应用研究[J]. 传感器与微系统, 2022,(5):1-5. DOI: 10.13873/J.1000-9787(2022)05-0001-05.
纳米压印技术的发展及其近期的应用研究[J]. 2022, (5): 1-5. DOI: 10.13873/J.1000-9787(2022)05-0001-05.
综述了热纳米压印、紫外纳米压印、微接触印刷三种具有代表性的纳米压印(NIL)技术的原理、工艺流程和优缺点,并介绍了近几年来纳米压印技术的研究进展及其在光学器件、存储器、柔性器件和生物传感器等领域中的应用现状。
综述了热纳米压印、紫外纳米压印、微接触印刷三种具有代表性的纳米压印(NIL)技术的原理、工艺流程和优缺点,并介绍了近几年来纳米压印技术的研究进展及其在光学器件、存储器、柔性器件和生物传感器等领域中的应用现状。
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