上海应用技术大学化学与环境工程学院 2. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
纸质出版:2022
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张海燕, 赵斌, 曹可, 等. 微型气相色谱柱芯片研究进展[J]. 传感器与微系统, 2022,(3):1-6+11.
微型气相色谱柱芯片研究进展[J]. 2022, (3): 1-6+11.
张海燕, 赵斌, 曹可, 等. 微型气相色谱柱芯片研究进展[J]. 传感器与微系统, 2022,(3):1-6+11. DOI: 10.13873/J.1000-9787(2022)03-0001-06.
微型气相色谱柱芯片研究进展[J]. 2022, (3): 1-6+11. DOI: 10.13873/J.1000-9787(2022)03-0001-06.
微型气相色谱仪可对复杂气体组分进行现场、实时、快速地定性和定量分析。微型气相色谱柱芯片作为微型气相色谱仪的核心部件之一,决定了其分离性能的好坏。微机电系统(MEMS)技术的发展为制造微型气相色谱柱芯片提供了有效的加工技术、可灵活选择的衬底材料,甚至可以通过MEMS技术制备均匀的固定相,从而获得具有更好分离性能的微型气相色谱柱芯片。综述了近年来基于MEMS技术的微型气相色谱柱芯片的研究进展,内容主要涉及微型气相色谱柱芯片的微沟道加工技术、柱内结构、芯片衬底材料以及固定相的制备方法等方面。
微型气相色谱仪可对复杂气体组分进行现场、实时、快速地定性和定量分析。微型气相色谱柱芯片作为微型气相色谱仪的核心部件之一,决定了其分离性能的好坏。微机电系统(MEMS)技术的发展为制造微型气相色谱柱芯片提供了有效的加工技术、可灵活选择的衬底材料,甚至可以通过MEMS技术制备均匀的固定相,从而获得具有更好分离性能的微型气相色谱柱芯片。综述了近年来基于MEMS技术的微型气相色谱柱芯片的研究进展,内容主要涉及微型气相色谱柱芯片的微沟道加工技术、柱内结构、芯片衬底材料以及固定相的制备方法等方面。
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