中北大学仪器科学与动态测试教育部重点实验室 2. 北方自动控制技术研究所
纸质出版:2022
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雷程, 冯伟, 梁庭, 等. 热处理对溅射在金属探针上的铂薄膜的影响[J]. 传感器与微系统, 2022,(2):9-13.
热处理对溅射在金属探针上的铂薄膜的影响[J]. 2022, (2): 9-13.
雷程, 冯伟, 梁庭, 等. 热处理对溅射在金属探针上的铂薄膜的影响[J]. 传感器与微系统, 2022,(2):9-13. DOI: 10.13873/J.1000-9787(2022)02-0009-05.
热处理对溅射在金属探针上的铂薄膜的影响[J]. 2022, (2): 9-13. DOI: 10.13873/J.1000-9787(2022)02-0009-05.
研究了退火温度对铂薄膜微观结构和电学性能的影响。在高曲率微小金属探针表面原位制造铂薄膜温度探测器
在450
500
550℃条件下进行退火。研究了不同厚度SiO
2
薄膜对铂薄膜表面形貌的影响
重点介绍了经过不同温度退火后铂薄膜表面形貌和电学性能变化及其两者之间的相关性。实验结果表明:在金属探针表面制备2μm的SiO
2
薄膜
既可以达到绝缘的效果
也可以保证粘附性。铂薄膜温度探测器初始电阻值、灵敏度和迟滞都有较大提高。但温度越高
对铂薄膜温度探测器的线性度影响越小。由于初始电阻值的变化幅度明显大于斜率ΔT/ΔR的变化幅度
所以电阻温度系数(TCR)均减小。因此
利用接近式光刻技术直接在高曲率物体表面制备金属薄膜
经过退火处理后可以得到稳定性高
响应速度较快、热阻性能较好的铂薄膜温度探测器。
研究了退火温度对铂薄膜微观结构和电学性能的影响。在高曲率微小金属探针表面原位制造铂薄膜温度探测器
在450
500
550℃条件下进行退火。研究了不同厚度SiO
2
薄膜对铂薄膜表面形貌的影响
重点介绍了经过不同温度退火后铂薄膜表面形貌和电学性能变化及其两者之间的相关性。实验结果表明:在金属探针表面制备2μm的SiO
2
薄膜
既可以达到绝缘的效果
也可以保证粘附性。铂薄膜温度探测器初始电阻值、灵敏度和迟滞都有较大提高。但温度越高
对铂薄膜温度探测器的线性度影响越小。由于初始电阻值的变化幅度明显大于斜率ΔT/ΔR的变化幅度
所以电阻温度系数(TCR)均减小。因此
利用接近式光刻技术直接在高曲率物体表面制备金属薄膜
经过退火处理后可以得到稳定性高
响应速度较快、热阻性能较好的铂薄膜温度探测器。
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Comparative study of air and vacuum annealing atmosphere towards Pt/Ti–W/SiO 2 stability [J] . Pardis Simon,Julien Nazon,Bruno Domenichini,Sylvie Bourgeois. Thin Solid Films . 2013
Platinum thin film electrodes for high-temperature chemical sensor applications [J] . Engin ?iftyürek,Katarzyna Sabolsky,Edward M. Sabolsky. Sensors & Actuators: B. Chemical . 2013
Pt/Ti/Al 2 O 3 /Al tunnel junctions exhibiting electroforming-free bipolar resistive switching behavior [J] . Doo Seok Jeong,Byung-ki Cheong,Hermann Kohlstedt. Solid State Electronics . 2011 (1)
A Healthy Future: Platinum in Medical Applications [J] . Cowley Alison Woodward* Brian. Platinum Metals Review . 2011 (2)
The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films [J] . M. Grosser,U. Schmid. Applied Surface Science . 2010 (14)
A cost-effective flexible MEMS technique for temperature sensing [J] . Suyan Xiao,Lufeng Che,Xinxin Li,Yuelin Wang. Microelectronics Journal . 2007 (3)
Thermal expansion behavior of a model ceramic–metal composite [J] . C.L. Hsieh,W.H. Tuan. Materials Science & Engineering A . 2007
Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering [J] . Monjoy Sreemany,Suchitra Sen. Applied Surface Science . 2006 (5)
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