Compared with traditional piezoelectric ultrasonic transducer

capacitive micromachined ultrasonic transducer has the advantages of broadband

high density array element integrated manufacturing and miniaturization.It has a wide application prospect in medical imaging

nondestructive testing and underwater imaging.A micromachined capacitive ultrasonic transducer is prepared by silicon micromachining technology and the transmitting performance of the transducer is tested and the results are analyzed.The test results show that the transducer has the ability to transmit ultrasound

and the sound pressure attenuation of the ultrasound transmitted in silicone oil conforms to the exponential attenuation law.The center frequency is about 4 MHz

and the 3 dB fractional bandwidth is about 87.5 %.When working at the center frequency

the sound pressure amplitude of the transducer output has a good linear relationship with the AC drive voltage signal

and the linearity is 2.06 %.