HOU Lijuan, QIN Huibin, HU Weiwei. Study on flexible capacitive pressure sensor based on microstructure design and simulation[J]. 2021, (12): 66-68+72.
HOU Lijuan, QIN Huibin, HU Weiwei. Study on flexible capacitive pressure sensor based on microstructure design and simulation[J]. 2021, (12): 66-68+72. DOI: 10.13873/J.1000-9787(2021)12-0066-03.
A kind of flexible capacitive pressure sensor based on polydimethylsiloxane(PDMS) and oxidized carbon nanotubes is designed
aiming at complex processing technology and structure of the flexible sensor
and on the basis of improving performance index of the sensor
the manufacturing cost is reduced and the manufacturing process is simplified. The sensor adopts sandwich structure
pyramid microstructure is added into the upper electrode layer
the conductive material is printed onto the flexible substrate by Sike screen printing process
PDMS film is prepared as intermediate dielectric layer. The lower electrode is laid with smooth conductive material. Based on the microstructure
it is more likely to deform under pressure
so the sensor will be more sensitive. The simulation results of the pyramid microstructure show that the shape variation of the sensor is larger when the microstructure is used under pressure. The sensor made by this method has the characteristics of low cost
simple process and high sensitivity
and has a broad application prospect in medical health detection and intelligent wearing.