A micro-electro-mechanical system（MEMS）vibration velocity type vector hydrophone based on space acoustic temperature multi-physical field is proposed

which can directly sense the particle vibration velocity vector signal of underwater acoustic field.The hydrophone has features of small volume

light weight

simple structure

high reliability

and no need of hanging installation.By setting up mathematical model and finite element simulation

design and optimization of sensitive unit of the sensor is achieved.The hydrophone is fabricated on the 6 inch MEMS process platform.The vibration liquid column method is used to measure the hydrophone.The results show that the equivalent sound pressure sensitivities of the hydrophone is-207 dB at 20 Hz

and it has relatively flat response characteristics at low frequency.