An in-run demodulation phase angle compensation method for micro-machined gyroscope with low-quality factor and small frequency split is proposed

to reduce the effect of quadrature error on the gyroscope bias performance.Based on the analysis of the gyroscope signal output

the demodulation phase angle error and quadrature error have harmful contribution on the gyroscope bias performance.Therefore

an in-run self-compensation method based on an external excitation signal is utilized to compensate demodulation phase angle

which detects the in-run demodulation phase angle.The simulation and experimental results show that the phase angle compensation method significantly improves the bias performance of the micro-machined gyroscope.The bias stability is reduced from 115.257 °/h to 31.406 °/h after compensation with about 72.7 % improvement.