YANG Wentao, FENG Zekun, LIU Changhua, et al. Realization of calibration platform for chip pressure sensor[J]. 2021, (9): 114-116+120. DOI: 10.13873/J.1000-9787(2021)09-0114-03.
basic working principle and calibration process of the chip sensor are discussed.On the basis of the temperature drift and nonlinear compensation polynomial model for bridge sensor
the calibration and conditioning process of sensor are analyzed and a calibration platform system scheme of chip sensor is proposed.In this scheme
the calibration platform is based on sensor signal conditioning communication board
mass calibration board and sensor device unit
upper PC integrates programmable logic controller(PLC)control unit
temperature and pressure regulating equipment and realize batch automatic configuration
measurement
calibration and detection of sensors.The calibration platform can effectively meet the requirements of calibration tasks for mass sensor products in actual production.