A high-temperature co-fired ceramic（HTCC）passive vibration sensor

which can work in an ultra-high temperature environment and realize online measurement of vibration parameters through the principle of wireless non-contact measurement is proposed.MATLAB software is used to simulate the structural parameters of the vibration sensor

and ANSYS Workbench simulation software is used for modeling of sensitive structures

static analysis

modal analysis and thermodynamic analysis.The results show that the sensitive structure of the vibration sensor can work normally in the load range of 0～30 g

n

and the first-order frequency of the modal simulation is 1 991.4 Hz

which is basically consis

tent with the harmonic response simulation.It is found that through thermodynamic simulation of the vibration sensor

the sensitivity of the vibration sensor increases with temperature in the range of 25～1 000 ℃

and the sensitivity at 1 000 ℃ is 0.114 kHz/g

n

.The vibration sensor provides new ideas for stable measurement of vibration parameter in ultra-high temperature.