DU Cunyu, AN Wei, YOU Lihua. Research and fabrication of linear displacement sensor based on IC-MU[J]. 2021, (8): 104-105+109. DOI: 10.13873/J.1000-9787(2021)08-0104-02.
基于IC-MU的直线位移传感器研制
摘要
基于小型化、数字化的传感器设计目标
以集成霍尔芯片IC-MU和磁栅为核心
研制一种新型绝对式直线位移传感器。介绍了基于霍尔芯片的传感器工作原理
给出了传感器结构和电路设计方案
并对传感器样机进行标定。针对传感器的非线性误差
分别采用分段线性插值法和三次样条插值法进行误差补偿。实验结果表明:传感器原始误差为0.014 mm
经两种方法补偿后
误差分别减小到0.003 6
0.003 0 mm
误差补偿有效。
Abstract
Based on design goal of miniaturized and digitized sensor
a new type of absolute linear displacement sensor is research and fabrication with the integration of Hall chip IC-MU and magnetic grid as the core.Working principle of the sensor based on Hall chip is introduced
sensor structure and circuit design scheme are given
and sensor prototype is calibrated.Piecewise linear interpolation and cubic spline interpolation methods are used to compensate the nonlinear error of the sensor.The experimental results show that the original error of the sensor is 0.014 mm
and the error is reduced to 0.003 6 mm and 0.003 0 mm