LI Rongjun, YU Yuan, TAN Jing, et al. Flexible strain sensor based on spraying and plasma processing[J]. 2021, (8): 76-78. DOI: 10.13873/J.1000-9787(2021)08-0076-03.
In order to improve the designability and repeatability of sensing layer pattern of flexible sensor and improve sensitivity of the sensor
a flexible stretchable resistance strain sensor are prepared using Ecoflex 0050 as the base layer using multi-walled carbon nanotubes as sensing layer
using two-dimensional planar controllable spraying and low-temperature plasma processing technology.The effects of low temperature plasma treatment on the resistance
stability and sensitivity factor of the sensor are studied.The results show that the sensing layer prepared by the controlled spraying method has a good response to tensile strain;the initial resistance of the sensing layer increases by 15 times after the low temperature plasma treatment; the strain is 10 %
during the 2 500 reciprocating stretching process
the resistance change of the flexible resistance strain sensor prepared by plasma treatment remained stable
and the sensitivity factor increased from 3.9 to 11.5.The sensitivity of the sensor is improved after plasma treatment.