LI Changqi, WANG Han, LUO Hao. Design and optimization of spatial 3-DOF micro-positioning platform[J]. 2021, (8): 65-67+72. DOI: 10.13873/J.1000-9787(2021)08-0065-03.
Coupling displacement directly affects the output precision of the micro-positioning platform.Controlling the coupling displacement of the spatial micro-positioning platform can effectively improve the output accuracy of the platform.Use control error compensation to eliminate the coupling displacement of the micro-positioning platform.The driving method of the platform is piezoelectric drive.The output displacement of the micro-positioning platform’s output is calculated based on the Karnofsky’s theorem; the size of the flexible hinge of the micro-positioning platform is optimized using ANSYS software
and the optimized micro-positioning platform is simulated and analyzed.Finally
the theoretical calculation value and the simulation analysis value are compared.Through the research of the micro-positioning platform
it is concluded that the platform has the advantages of high positioning accuracy
low coupling displacement and large stroke
which can be used as a reference for the research of similar micro-positioning platforms.