An optical detection method for a micro-opto-electro-mechanical system gyroscope is proposed.A micro-optical detection device composed of grating couplers

a whispering gallery mode resonator and an optical waveguide is designed to realize monolithic integration with a disk resonant gyroscope.The spectral drift and coupling mechanism of the resonator is theoretically analyzed.By adjusting the structural parameters

the quality factor is 5 303.1.The effects of grating period

etch depth

incident angle and upper cladding layer on the coupling efficiency of the grating couplers are analyzed

and 51.5 % horizontal coupling is finally achieved through continuous optimization of adjustment.Finally

the test results are discussed.