Principle of capacitance detection circuit is analyzed

C/V module circuit

interface circuit and zero offset and scale factor compensation circuit are optimized design

and the integration test is carried out by constructing the circuit and the combined micro-machined differential capacitor structure.After testing and verification

the micro-electro-mechanical system（MEMS）vibration sensor signal detection circuit has a good detection and amplification effect on the weak capacitor

and has strong interface adaptability and protection capability.