A new diamond hemisphere microgyroscope structure is proposed.The finite element model for vibration structure is established by using finite element analysis softwarel

Comsol.The modal analysis and harmonic response analysis simulations are carried out respectively.The results of modal analysis simulation show that the frequency difference of the working mode of the structure is 76 Hz

and the minimum difference between the working mode and the parasitic mode natural frequency is 37 045 Hz.The harmonic response analysis shows that the vibration frequency of the gyro working mode in the 0° direction is 26 593 Hz.The maximum displacement is 0.021 μm

and the vibration frequency of the 45° direction is 26 669 Hz

and the maximum displacement is 0.0064 μm.A self-aligned fabrication process is subsequently proposed

the method using the process to fabricate sixteen integrated diamond electrodes uniformly distributed outside the hemispherical shell can ensure uniform capacitance across the circumference.