According to the application environment of aviation engine system

a single core body differential pressure sensor is researched and fabricated

the sensor based on sapphire substrate silicon piezoresistive effect is measured

and different from common oil-sealed single core body

in current market

its chip direct sintering on the diaphragm

chip through feeling positive force formed by metal diaphragm together to measure the differential pressure signal

avoid the pressure medium containing oil seal oil transfer without such shortcomings as can bear high temperature and too back pressure to wear

raise the reliability of the high temperature resistant capacity and pressure sensor.Principle

design and implementation of single core silicon sapphire differential pressure sensor are introduced

including the design of normal structure and circuit design.The sensor has passed the performance test and environmental adaptability test

and the relevant thermal test has been carried out on the engine with the whole machine.The results show that the sensor can meet the requirements of the engine.