Alkali metal vapor cell is the core component for atomic sensor such as gyroscope

magnetometer and atomic clock. Miniaturization is an important developing direction for modern alkali metal vapor cells by using micro-electro-mechanical system（ MEMS） technology. These technologies including laser punching

ultrasonic milling

wet chemical etching and deep reactive ion etching for silicon through hole formation; direct bonding

eutectic bonding

adhesive bonding and anodic bonding for wafer bonding; direct filling

in-situ chemical reaction

UV decomposition of alkali metal azides

laser ablation of wax micro-packet

and electrolytic decomposition of alkali metal-enriched glass for alkali metal filling

etc. Relative technologies are reviewed and their advantages and disadvantages are analyzed.