DAI Xuemei, CHEN Zeji, KAN Xiao, et al. Design of high-performance interface circuit for RF-MEMS filter[J]. 2021, (2): 79-82. DOI: 10.13873/J.1000-9787(2021)02-0079-04.
使RF-MEMS滤波器的插入损耗降低至0.56 d B。测试与PCB板级电路级联的MEMS滤波器输出信号表明:RF-MEMS滤波器的插入损耗降至16.2d B
相对带宽为1.4%
中心频率为73.02 MHz
提升了MEMS滤波器在无线通信中的应用潜力。
Abstract
A high-performance interface amplifying circuit for radio frequency micro-electro-mechanical system( RF-MEMS) filter is presented. A silicon-based MEMS filter with relative bandwidth of 1. 4 % and center frequency of 73. 02 MHz is fabricated by micro/nano fabrication process. As for high resistance and high insertion loss( IL) characteristics that
MEMS filter has low-noise
high-gain two-stage amplifier circuit based on operational amplifier and impedance matching circuit are designed. The simulation results indicate that the interface circuit has good amplification effect on HF filter with the gain can achieve 62. 75 d B
noise coefficient of 3. 35 d B and S22 reflection coefficient of-46. 91 d B
which can make the insertion loss( IL) RF-MEMS filter decrease to 0. 56 d B.Testing output signal of MEMS filter cascaded with the PCB board relative circuit indicates that the IL of the RFMEMS filter is reduced to 16. 2 d B
the relative bandwidth is 1. 4 %
and the center frequency is 73. 02 MHz
improving the application potential of MEMS filters in wireless communications.