A sensitive"sandwich"structure for closed-loop micro-electro-mechanical accelerometer based on the principle of capacitive detection is proposed

and main indexes such as the capacitance of the sensitive structure

range of the micro-electro-mechanical accelerometer and scale factor are designed

and the modal simulation verifiesthe effectiveness of the structural parameters on frequency isolation between the working mode and the interference mode.The package/assembly scheme of the closed loop and double cavity of the discrete circuit is designed

and the whole prototype of the micro-electro-mechanical accelerometer is realized.The prototype range and one-time power-on stability indicators are tested.The test results show that the accelerometer achieves ran

ge >± 50 g

n

one-time power-on stability（1 h

1 σ） reaches 5.97 ×10

-5

g

n

.