In order to meet the application requirements of"smart ocean"

a batch of integrated micro-/nanosensors with three parameters of temperature

salinity and acidity（pH） are designed and fabricated based on microelectro-mechanical system（MEMS） technology.Platinum resistance sensor is used for temperature measurement

4-electrode conductivity sensor is used for salinity measurement

and two electrode system composed of Ti/TiO

2

working electrode and liquid connected Ag/Ag Cl reference electrode is used for pH measurement.The basic parameters and performance of the three sensors are measured by electrochemical workstation.The

resistance of the temperature sensor is（2 240 ± 5） Ω

the sensitivity is 8.636 Ω/℃

and the measurement precision is ± 0.01 ℃;the precision of conductivity sensor in 0.01 mol/L KCl solution is ± 0.000 5 s/m

and the sensitivity of pH sensor is 42.86 mV/pH.Due to the use of MEMS technology

the sensor is small in size

low in cost and can be manufactured in batch.It will provide the core sensor for high-precision grid measurement of marine environmental parameters.