HAN Wenman, GUO Tao. Structure optimization and simulation analysis of high-range acceleration sensor[J]. 2021, 40(1): 20-22. DOI: 10.13873/J.1000-9787(2021)01-0020-03.
高量程加速度传感器的结构优化与仿真分析
摘要
在传统双边四梁结构的基础上
优化设计了一种高量程加速度传感器结构
量程为10 000 gn。理论上对其进行了应力分析
验证了结构的合理性
并通过有限元建模对传感器进行了静态结构分析
模态分析和抗过载能力分析。在恒压源供电条件下
传感器的固有频率大于50 kHz
灵敏度理论值为18.88μV/gn
抗过载能力为20000 gn。与传统结构相比
极大地提高了高量程加速度传感器的性能。
Abstract
On the basis of traditional double-sided four-beam structure
a high-range acceleration sensor structure is optimized and designed
with measuring range of 10 000 gn.Theoretical analysis of the stress is performed to verify the rationality of the structure
and static structural analysis
modal analysis
and anti-overload capability analysis of the sensor are performed through finite element modeling.Under the condition of constant voltage source power supply
the natural frequency of the sensor is greater than 50 kHz
the theoretical sensitivity value is 18.88 μV/gn
and the anti-overload capability is 20 000 gn.Compared with the traditional structure
it greatly improves the performance of high-range acceleration sensors.