A novel micro-electronic-mechanical systems（ MEMS） accelerometer is researched

front and back side anchored structure is taken to counteract transverse output fundamentally with full advantage of 3 D symmetrical. A micromechanics model of the structure is presented to analyze sensitivity

resonance frequency and transverse sensitivity. Parameters of the structure is optimized with finite element simulation. The structure obtain range20 × 104 gn

while sensitivity is better than 0. 8 μV/gn/10 VDC

transverse sensitivity is less than 1%

resonant frequency is more than 613 k Hz

which meets the requirement of engineering application. Fabrication process scheme based on bulk MEMS technology is proposed.