The setting of electrode plate spacing is closely related to the self-test performance. Over-sized plate spacing affect the engineering of the device

while under-sized plate spacing can’t meet the working displacement of the device. Therefore

design of the plate spacing is the key to design the quartz vibrating beam accelerometer with self-test. Ideal electrostatic drive model and pull-in model are established aiming at the problem. From theoretical analysis and simulation verification

the function of the critical pull-in voltage is obtained. At the same time

the applied acceleration of the two models at different voltages is compared for error analysis. It is concluded that the distance between the plates is linear with the maximum acceleration that can be simulated. Based on this finding

the process of the setting of electrode plate spacing is proposed

and that the sensor performance reaches the best with the electrode plate spacing to be 19 μm is proved.