FAN Shucong, ZHANG Jiqiang, HUANG Libin, et al. Research on circuit bandwidth measurement method of silicon micro-resonant accelerometer[J]. 2020, (8): 20-22.
FAN Shucong, ZHANG Jiqiang, HUANG Libin, et al. Research on circuit bandwidth measurement method of silicon micro-resonant accelerometer[J]. 2020, (8): 20-22. DOI: 10.13873/J.1000-9787(2020)08-0020-03.
该带宽测试模型与MSRA实际测试情况一致。实验结果表明:MSRA锁相环驱动电路的实测+3 d B的带宽值为210 Hz
与模型仿真得到的216 Hz基本吻合。该测试方法具有精度高、易实施、成本低等特点
可满足锁相环驱动电路的带宽测试需求。
Abstract
Taking the independently developed micro-machined silicon resonant accelerometer( MSRA) as research object
a bandwidth test scheme based on phase locked loop( PLL) demodulation circuit is designed for the bandwidth test of its drive circuit. Firstly
SIMULINK simulation model is established for the phase transfer function of the PLL driving circuit
and the closed-loop model is analyzed. It can be concluded that the excitation signal generated by field programmable gate array( FPGA) is loaded on the input port of the PLL
which is equivalent to the input signal of the PLL under the change of external acceleration frequency
and the output amplitude of the driver circuit of the accelerometer is read out by the demodulation circuit based on the PLL. This bandwidth test model is consistent with the actual test situation of MSRA. Experimental results show that the measured bandwidth of + 3 d B of MSRA PLL driver circuit is 210 Hz
which is basically the same as the 216 Hz obtained by the model simulation. This test method has the characteristics of high precision
easy implementation and low cost
and can meet the bandwidth test requirements of the PLL driving circuit.