WEI Zanren, ZHANG Jiqiang, LI Hongsheng. Scale factor improving and temperature compensation for MEMS ring gyroscope[J]. 2020, 39(7): 31-34. DOI: 10.13873/J.1000-9787(2020)07-0031-04.
微振环陀螺标度因数改善与温度补偿
摘要
微机械振环陀螺是基于哥里奥利效应敏感角速度的高精度振动惯性器件
驱动模态和检测模态不匹配将影响陀螺检测的灵敏度
而温度会影响其稳定性。分析了非理想环的动力学方程和静电调谐原理
推导了标度因数与谐振频率的关系并分析温度对标度因数的影响
建立了标度因数温度漂移模型
采用静电调谐技术解决了由于加工差异和单晶硅的各向异性导致的振环陀螺模态失配
在测控系统输出端对标度因数进行了温度补偿。调谐后的标度因数提高到原来的3倍左右
温度漂移从常温下的±14%补偿到±3%
证明了方案的有效性。
Abstract
As a high precision vibrating inertial instrument
MEMS ring gyroscope is sensitive to angular velocity based on the Coriolis Effect. However
the mismatch between the drive mode and the detection mode will affect its sensitivity
while the temperature will affect its stability. The dynamics equation of the imperfect ring and the theory of electrostatic tuning is analyzed
and the relationship between the scale factor and the resonant frequency is derived to analyze the influence of temperature on the scale factor. Then the scale-factor temperature drift model is built. Therefore
the mode mismatch caused by the anisotropy and fabrication defects of the ring gyroscope will be solved with the method of electrostatic tuning
and the scale factor will be compensated in the output of the system.Experiments indicate that the scale factor has increased by about 3 times after electrostatic tuning
and temperature offset has reduced from about ± 14 % at normal temperature to ± 3 %
which demonstrates the effectiveness of these methods.
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