中国电子科技集团公司第四十九研究所
纸质出版:2020
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文吉延, 刘玺, 刘志远, 等. 厚膜氢气传感器设计[J]. 传感器与微系统, 2020,(6):92-94.
WEN Jiyan, LIU Xi, LIU Zhiyuan, et al. Design of thick film hydrogen sensor[J]. 2020, (6): 92-94.
文吉延, 刘玺, 刘志远, 等. 厚膜氢气传感器设计[J]. 传感器与微系统, 2020,(6):92-94. DOI: 10.13873/J.1000-9787(2020)06-0092-03.
WEN Jiyan, LIU Xi, LIU Zhiyuan, et al. Design of thick film hydrogen sensor[J]. 2020, (6): 92-94. DOI: 10.13873/J.1000-9787(2020)06-0092-03.
报道了一种基于厚膜工艺的氢气传感器。首先采用丝网印刷工艺制作铂加热器线条
再在其上面分别覆有纳米催化剂/氧化铝形成气敏元件、涂覆纳米氧化铝构成补偿元件
最后制成氢气传感器。测试结果表明:传感器灵敏度大于21 m V/1%H2
响应时间小于30 s
非线性和重复性优于2%。
A hydrogen sensor based on thick film process is reported. Firstly
Platinum heater lines are made by screen printing process
then it is coated with nano-catalyst/alumina to form gas sensitive element and coated with nano-alumina to form compensation element
respectively. Finally
hydrogen sensor are made. The test results show that the sensitivity of the sensor is greater than 21 m V/1% H
2
the response time is less than 30 s
both the nonlinearity and repeatability are prior to 2 %.
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