WANG Xiaochu, GUO Shuailiang, LIU Yuxian, et al. Research on anti-vibration of MEMS sensor in IMU under mechanical vibration stress[J]. 2020, (6): 33-36.
WANG Xiaochu, GUO Shuailiang, LIU Yuxian, et al. Research on anti-vibration of MEMS sensor in IMU under mechanical vibration stress[J]. 2020, (6): 33-36. DOI: 10.13873/J.1000-9787(2020)06-0033-04.
Aiming at the problem that micro-electro-mechanical system( MEMS) sensor is stuck on PCB in inertial measurement unit( IMU)
the mechanical vibration generated by external carrier is forced to vibrate
longterm effects can cause problems such as mechanical fatigue
structural fracture
and performance degradation of the sensor
according to the principle of structural dynamics
the two-degree-of-freedom system model is analyzed
and the simulation is performed by MATLAB software to find out the influencing factors and their setting range. At the same time
the signal transmitted to the accelerometer by 1︰1 within the accelerometer bandwidth is guaranteed.The research results show that when the mechanical vibration signal of the carrier is in the range of 10 kHz
appropriately reduce the quality factor of the gyroscope and the accelerometer
natural frequency of the PCB is kept within 1 k Hz and the quality factor is not more than 10
which can effectively reduce the influence of vibration stress on the sensor.