Micro-electro-mechanical system（ MEMS） resonant accelerometer have become a hot topic due to large dynamic range

high sensitivity and high stability. On the basis of system modeling and simulation analysis of the resonant accelerometer with the oscillating circuit as interface circuit

a silicon MEMS resonant accelerometer prototype is desig

n

ed and tested. The simulation and experimental results show that when the bandwidth of the closed-loop oscillating interface circuit and the frequency measurement circuit are much larger than the bandwidth of the sensor itself

the frequency response characteristic of the scale factor is determined by the frequency characteristic of the second-order system

of the sensitive mass of sensor. The static performance test results of the silicon MEMS resonant accelerometer prototype show the range is ± 12. 5 g

n

scale factor is 662. 1 Hz/g

n

bandwidth is 400 Hz

bias stability is 34.09 μg

n

noise is 22.18μg

n

/Hz

1/2

.