Through designing optimized ring upper electrode structure and widely used gridiron upper electrode structure

theoretical research and comparison test and analysis are carried out

computing research is carried out using the Looyenga and Dubinin equation. Optimization research on porous structure of upper electrode is carried out

in order to expand the porosity

so as to improve the efficiency of water molecules going through the upper electrode

so as to shorten the response time of capacitive humidity sensor. It is found that the optimized design of ring upper electrode can improve the response characteristics of humidity sensor.