Based on the micro-electro-mechanical system（ MEMS） technology

high-precision and miniaturized conductivity and temperature（ CT） micro-/nano-sensors are designed and batch manufactured. The test results show that the CT micro-/nano-sensor with the size of 12 mm × 12 mm has excellent linearity of conductivity（ R~2≥0. 999 99） and temperature（ R~2≥0. 999） measurements. The temperature sensitivity of the micro-/nano-sensor is 0. 063 ℃/Ω

and the coefficient of variation（ CV） of the three repeated temperature calibration experiments is 0. 6 %

which shows that the micro-nano-sensor has excellent repeatability. A group of micro-nano-sensors are randomly selected for batch evaluation. Th

e standard deviation of conductivity cell constant K is ± 0. 019 cm

-1

which shows excellent consistency of micro-nano-sensors from a batch. The CT micro-nano-sensor has the advantages of small size

low cost and high consistency for batch

and is suitable for large-scale measurement of marine environmental parameters.