A hydrogen sensor based on Schottky diode is represented. In ambient

hydrogen molecule is chemically adsorbed on the surface of palladium films

then it is dissociated into hydrogen atom

and subsequently hydrogen atoms diffuse into the interior of palladium metal film Schottky diode barrier lowering

which results in drift of I-V curves

hydrogen detection can be achieved. In this experiment

palladium films are prepared by sputtering method. The sensitive properties are tested. The result of the experiment demonstrates that its response characteristic to hydrogen is good

and the measurement range is（ 0～ 10 000） × 10

-6

.