A new type of catalytic sensor using Ni thin film as heater based on MEMS technology is designed. The Ni thin film heater is manufactured by magnetron sputtering deposition

etching

etc

and then stabilization heattreating and coated by anti-oxidation polymer. The performance test results of the sensor show that Ni thin film heater has good anti-high temperature oxidation ability; atmosphere aging can shorten the aging time by half; the CH4 gas volume fraction has a good linear relationship with sensitivity of the sensor; the sensitivity to 1 % Vol CH4 gas is about 30 m V; the power consumption of the sensor is about 150 m W; the zero-point and sensitivity annual drift are less than 1. 5 % LEL.