Aiming at problem that resonant micro-electro-mechanical system（ MEMS） gyroscope faces is the existence of parasitic capacitance between driving and sensing electrodes

this parasitic capacitance results in electrical feed-through of the drive signal

so as to limit the sensitivity of gyroscope. Hence

a novel driving mode

parameter excitation method is used

and parametric excitation is applied to a resonant MEMS gyroscope.Parametric excitation method can effectively change stiffness of the gyroscope. Simulation test show that by adjusting parameters of parametric excitation signal such as frequency

amplitude

phase

electrical feed-through may be significantly reduced in a controllable manner.