Due to small size

when using conventional static calibration method of thermocouple to calibrate thinfilm thermocouple（ TFTC）

the temperature gradient distributions in sensor and compensating wires are different in calibration and application processes

so the thermal electromotive forces of TFTC are also different

this has an impact on the accuracy of temperature measurement. To solve this problem

a self-calibration thin-film temperature sensor

which combines Au-Pt TFTC and the thin-film platinum resistor

and its calibration system are designed.The sensor is manufactured by the electronic printing method. The laser heating technique is used to simulate the temperature distribution of TFTC in application. The temperature distribution rule of sensor is analyzed based on the finite element simulation. The static self-calibration of TFTC is realized based on the temperature extrapolation. The result shows that the Seebeck coefficients of the TFTC in sensor are from 5. 3 to 7. 6 μV/℃ in the range from room temperature to 300 ℃.